Applied optics
-
We performed an illumination simulation, wave-optical simulation, and experiment on a zoom homogenizer and conventional beam homogenizer. The wave-optical simulation was performed for each lenslet using the shifted angular spectrum method for effective memory use. ⋯ The uniformity and peak effect of the beam homogenizer were 16.57% and 16.63%, respectively, but those of the zoom homogenizer were 7.15% and 1.46%, respectively. The illumination field generated by the zoom homogenizer had a higher uniformity and lower peak effect at all zoom positions than the conventional one.